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Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems
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Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems
-- Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
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Title
Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems -- Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Call No
C 13.10:260-129
Authors
Potzick, James E
National Institute of Standards and Technology (U.S.)
Subjects
Microscopes--Calibration--Standards.
Integrated circuits--Masks--Measurement.
Chromium--Spectra--Standards.
Language
English
Published
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington : For sale by the Supt. of Docs., U.S. G.P.O., 1997.
Publication Desc
xiii, 23 p. : ill. ;
Series
NIST special publication 260-129
Standard reference materials
Dimensions
28 cm.