Item Detail Information
Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems : standard reference materials
microform
Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems : standard reference materials
Copies
1 Total copies, 1 Copies are in, 0 Copies are out.
Title
Antireflecting-chromium Linewidth Standard, Srm 473, For Calibration Of Optical Microscope Linewidth Measuring Systems : standard reference materials
Call No
C 13.10:260-119
Authors
Vezzetti, Carol F
Varner, Ruth N
Potzick, James E
National Institute of Standards and Technology (U.S.)
Subjects
Microscopes--Calibration--Standards.
Integrated circuits--Masks--Measurement.
Chromium--Spectra--Standards.
Language
English
Published
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service, 1992].
Publication Desc
1 v.
Series
NIST special publication 260-119