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The Certification Of 100 Mm Diameter Silicon Resistivity Srms 2541 Through 2547 Using Dual-configuration Four-point Probe Measurements
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The Certification Of 100 Mm Diameter Silicon Resistivity Srms 2541 Through 2547 Using Dual-configuration Four-point Probe Measurements
-- Certification of one hundred mm diameter silicon resistivity SRMs ...
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Title
The Certification Of 100 Mm Diameter Silicon Resistivity Srms 2541 Through 2547 Using Dual-configuration Four-point Probe Measurements -- Certification of one hundred mm diameter silicon resistivity SRMs ...
Call No
C 13.10:260-131
Authors
Ehrstein, James R
Croarkin, M. C. (Mary Carroll), 1934-
National Institute of Standards and Technology (U.S.)
Subjects
Silicon.
Silicon--Electric properties.
Language
English
Published
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1997.
Publication Desc
xv, 84 p. : ill. ;
Series
NIST special publication 260-131
Standard reference materials
Dimensions
28 cm.